PZT 단순보를 이용한 저주파수 에너지 하베스터에 관한 연구

초록

A vibration-driven MEMS PZT beam device is developed for energy harvesting applications. This paper presents a piezoelectric based energy harvester which is suitable for power generating from conventional vibration and has in providing energy for low power electronic devices. PZT beam uses the d33 mode and is fabricated with simple steps. The 1000 um piezoelectric beam was a mechanical resonance frequency of 400 Hz . A power output of 6 uW at 0.5g acceleration has been experimentally achieved. The piezoelectric micro energy harvester could be used for various applications such a batteryless micro sensors and micro power generators.