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Effects of Microwave-assisted Annealing on Nanostructureal Evolution of a-SiC Thin Films Prepared by PECVD

  • CHO NAMHEE
제목
Effects of Microwave-assisted Annealing on Nanostructureal Evolution of a-SiC Thin Films Prepared by PECVD
저자
CHO NAMHEE
학회명
6th International Conference on Nanotechnology, Nanomaterials & Thin Films for Energy Applications
학회 개최일
2019-07-27 ~ 2019-07-29

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