실리콘 광 송수신 모듈 용 MEMS 광 스위치의 제작

초록

We have developed a novel MEMS optical switch. To make the fabrication easy, we designed the device as simple as we can maintain the optical properties of the switch enough to use in an optical communication system. The device was fabricated by using surface micromachining technologies, and self assembled by using photoresist pad. Detailed optical properties of the switch will be discussed later.