산소 프라즈마 표면 처리에 의한 OLED 소자의 발광특성

초록

In this research, we investigated the effect of O2/O3 plasma treatment of indium-tin-oxide (ITO) surface on the performance of organic light emitting devices (OLEDs). The OLED had a sturcture of ITO/TPD/Alq3/Al. The ITO surface was treated by O2/O3 plasma with different RF power, chamber pressure and exposure time. As a result, the emission efficiency of the OLEDs could be improved obviously.