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Dependence of cation ration in oxynitride glasses on the plasma etching rate

  • KIM HYUNG SUN
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Dependence of cation ration in oxynitride glasses on the plasma etching rate
저자
KIM HYUNG SUN
학회명
한국재료학회 추계학술발표대회 및 제17회 신소재 심포지엄

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