슬러리 분리 공급 시스템을 가진 MR polishing을 이용한 질화알루미늄 세라믹스의 초정밀 연마

초록

Ultra-precision polishing experiments for prepared AlN ceramics were performed using magnetorheological (MR) fluids and diamond abrasive slurries. The AlN ceramic specimens were prepared by hot-pressing. The specimens were machined by lapping and sand paper polishing before the MR polishing process. A series of experiments were performed under various polishing conditions by changing the current intensities, wheel rotation speeds, and polishing times. A developed MR polishing system with separate slurry supply units was used for the experiments. The polished surfaces were observed using SEM, AFM and a three-dimensional surface profiler was used to investigate the changes in the surface roughness and the shape accuracy. As the results, very fine surface roughness was obtained under appropriate experimental conditions. Also, it was observed that the MR polishing method can create excellent surface roughness and shape accuracy compared to existing polishing methods.