마그네트론 DC 스퍼터링에 의한 광소자용 거울면의 표면조도 향상

초록

이경철, 조수범, 이민우, 오범환, 박세근, 이승걸, 이일항, 류한권, 이현삼 We have investigated the influence of dry etching parameters on the smoothness of an optical MEMS mirror and also improved its smoothness by depositing gold thin-film on the surface with a Magnetron DC sputtering. The improvement in the surface roughness of an optical MEMS mirror was confirmed by AFM(Atomic Force Microscopy), and the best roughness was measured to be ~15nm(RMS) for final gold layer.