Plasma Charging Damage to MISFET with HfO2/TaN Gate Structure

Plasma Charging Damage to MISFET with HfO2/TaN Gate Structure
제목
Plasma Charging Damage to MISFET with HfO2/TaN Gate Structure
제목 (타언어)
Plasma Charging Damage to MISFET with HfO2/TaN Gate Structure
저자
O BEOM HOAN
학회명
AVS 2005