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Plasma Charging Damage to MISFET with HfO2/TaN Gate Structure
Plasma Charging Damage to MISFET with HfO2/TaN Gate Structure
- 제목
- Plasma Charging Damage to MISFET with HfO2/TaN Gate Structure
- 제목 (타언어)
- Plasma Charging Damage to MISFET with HfO2/TaN Gate Structure
- 저자
- O BEOM HOAN
- 학회명
- AVS 2005