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Effect of Si cap layer on interface quality and NBTI in Ge-on-si with HfSiO for High Mobility Channel pMOSFETs
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- Effect of Si cap layer on interface quality and NBTI in Ge-on-si with HfSiO for High Mobility Channel pMOSFETs
- 저자
- RINO CHOI
- 학회명
- 4th International Symposium on Advanced Gate Stack Technology