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Effect of Substrate Tpye on Overall Performance of Magnetostrictive Thin Film Cantilever Actuator for MEMS

제목
Effect of Substrate Tpye on Overall Performance of Magnetostrictive Thin Film Cantilever Actuator for MEMS
저자
CHO CHONG DU
학회명
5th International Conference on MEMS NANO, and Smart Systems

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