Static and Dynamic Characteristics of LM guide with Equivalent Stiffness Model

초록

The LM guide is a fundamental component in creating precise movements of the equipment such as semiconductor packaging equipment. This component consists of a slide block with ball bearings and a rail. In recent years, finite element analysis (FEA) is used to optimize the equipment in the equipment design stage. However, in the case of the LM guide, FEA of the equipment with LM guides is very difficult because of the complicated contact geometry and conditions. Numerous studies of LM guide have been conducted to simplify contact conditions and to apply simplified model to the analysis. They considered the LM guide with preload in each application [1,2] and study to construct the LM guide model with equivalent stiffness via experiment and FEA [3,4]. Through this study, the geometrically complicated LM guide can be expressed by a simplified equivalent stiffness model which has same static and dynamic characteristic with actual.