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초록
In this research, we have fabricated aligned ZnO nanorod arrays using the hydrothermal method and AAO nanotemplates. Firstly, a 45-nm-thick ZnO seed layer, and a 3-μm-thick Al layer were deposited on a glass substrate RF sputtering. After the deposition process, Al layer was anodized by conventional 2-step anodizing process, to form an AAO nanotemplate.
- 제목
- Alignment of ZnO nanorods using a hydrothermal method and anodic aluminum oxide nanotemplates
- 저자
- LEE SEUNG GOL
- 학회명
- 36th International Conference on Micro and Nano Engineering 2010
- 개최지
- Genoa
- 학회 개최일
- 2010-09-19 ~ 2010-09-22