압전작동기를 이용한 레이저 스캐닝 미러의 위치제어

초록

This paper presents the position tracking control of a laser scanning mirror system in which piezoelectric actuator is incorporated. Using the shear mode of the piezoelectric actuator, angular oscillation of a laser sacnning mirror is derived. Torsion bar is then designed and attached to the piezoelectric actuator in order to magnify the amplitude generated by the actuator. After analyzing modal parameters via the finite element method, the transfer function between electrical excitation and mechanical shear deformation is found. Tracking control performance for desired trajectory which is in fact sinusoidal curve is presented to demonstrate the validity of the proposed system.