UV embossing 방법을 이용한 채널 도파로의 제작

초록

We report on the fabrication process of UV embossing lithography by using conventional photolithography technique and electroplating. By using the fabricated stamp for UV embossing. The channel waveguide could be sucessfully replicated on the glass. The shapes of replicated waveguide device were good agreement with the master pattern with photoresist.