Optical and structural properties of multi-period low-emissivity filters by RF magnetron sputtering

  • CHANG KWON HWANGBO
제목
Optical and structural properties of multi-period low-emissivity filters by RF magnetron sputtering
저자
CHANG KWON HWANGBO
학회명
The 1st Symposium on the Nano-Technology and Plasma Application for next generation processing