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Plasma etching characteristics of sapphire, alumina and Y2O3-SiO2-Al2O3 glass

  • KIM HYUNG SUN
제목
Plasma etching characteristics of sapphire, alumina and Y2O3-SiO2-Al2O3 glass
저자
KIM HYUNG SUN
학회명
The 26th International Japan-Korea seminar on ceramics
개최지
Tsukuba, Ibaraki, Japan

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