Dielectric properties Ba1-xSrxTiO3 film by aerosol deposition

초록

BaxSr1-xTiO3(BST) is one of the well known ferroelectric materials. The effect of Sr2+ substitution on the structure and dielectric behavior of BaTiO3 is reported. The BST films were found to have relaxor-like properties and lower curie temperature Than BaTiO3 of 120℃. As the Sr2+ content increases, Curie temperature is lowered. Here, we fabricated BST films by aerosol deposition(AD) on silicon wafer coated Pt. The BST films could have nano-sized grain and dense microstructure. BST films with nano-grains have relaxor-like dielectric behavior.