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Evaluation of crystallinity in laser-annealed polysilicon thin films using Raman spectroscopy and spectroscopic ellipsometry
- 제목
- Evaluation of crystallinity in laser-annealed polysilicon thin films using Raman spectroscopy and spectroscopic ellipsometry
- 저자
- RYU HANYOUL
- 학회명
- Nano Korea 2021 (The 19th International Nanotech Symposium)
- 개최지
- COEX
- 학회 개최일
- 2021-07-07 ~ 2021-07-09