Evaluation of crystallinity in laser-annealed polysilicon thin films using Raman spectroscopy and spectroscopic ellipsometry

제목
Evaluation of crystallinity in laser-annealed polysilicon thin films using Raman spectroscopy and spectroscopic ellipsometry
저자
RYU HANYOUL
학회명
Nano Korea 2021 (The 19th International Nanotech Symposium)
개최지
COEX
학회 개최일
2021-07-07 ~ 2021-07-09