Machinability Evaluation of Si3N4-BN Composites for Micro Pattern Making Processes

초록

In this study, machinablilty evaluation of Si3N4-BN composites is performed for micro pattern making processes. First, R-curve behavior of Si3N4-BN composites is investigated to understand its machinability. And, micro-powder blasting and micro-drilling processes are performed for the machinability evaluation of the composites. In the micro powder blasting process, the machining effects on the erosion depth of samples using three different mask patterns are analyzed by varying the nozzle scanning times and compositions of BN. Also, in the micro drilling process, small holes are drilled using micro-drilling machine under variable conditions. Finally, machinablity of Si3N4-BN composites is investigated based on the obtained data.