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RF 전력과 산소유량비에 따른 투명전극용 AZO 박막의 특성비교

Effects of power and O2/Ar flow ratio on the properties of AZO thin films for transparent electrodes deposited by RF magnetron sputtering
  • CHONGMU LEE
제목
RF 전력과 산소유량비에 따른 투명전극용 AZO 박막의 특성비교
제목 (타언어)
Effects of power and O2/Ar flow ratio on the properties of AZO thin films for transparent electrodes deposited by RF magnetron sputtering
저자
CHONGMU LEE
학회명
2005년도 한국재료학회

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