Use of protective layer on Ag thin film and its application in optical coating

초록

Using Ti, ITO and TiOX as the protective layers for Ag, EMI shielding filters for display applications were fabricated with the repetition of [TiO2|protective|Ag|TiO2] structure by RF magnetron sputtering. Their optical and structural properties were characterized by spectrophotometry, SEM, RBS, AES, and XPS and those results were compared.