포토리지스트 흘림 공정을 이용한 곡선형 수직 광 결합 구조의 제작

초록

VLSI photonics require highly integrated optical circuit structures, thus it is important to realize 3-dimensional optical coupling structures to enhance optical device integrity. In this paper, novel vertical optical coupling structures for those applications are introduced and fabricated by using deep silicon etch and photoresist reflow process. Introduced structures are designated to be used as an original structure of a mold fabrication process, thus replication process was followed to create a polymer replica which can be directly used as a optical interconnection structure