Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns

Lim, Yongjun; Oh, Kwan-Jung; Park, Jaehyeung

doi:10.1109/ICTC55196.2022.9952707

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Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns

Lim, Yongjun;
Oh, Kwan-Jung;
Park, Jaehyeung

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초록

Binarization is required to quantize data values in computer-generated holograms especially designed for lithographic process. However, there are some unwanted quality issues caused by binarization in reconstructing computer-generated holograms. In this paper, we experimentally show spectral noise components caused by the binarization. © 2022 IEEE.

키워드

binarization; computer-generated holograms; spectrum

제목: Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns

저자: Lim, Yongjun; Oh, Kwan-Jung; Park, Jaehyeung

DOI: 10.1109/ICTC55196.2022.9952707

발행일: 2022

유형: Conference paper

저널명: International Conference on ICT Convergence

권: 2022-October

페이지: 803 ~ 805