집속 레이저 빔에 의한 PDP 격벽의 마스크레스 식각

초록

The PDP(Plasma Display Panel) barrier rib was fabricated by focused Ar+ laser(λ=514 ㎚) and Nd:YAG(λ=532, 266 ㎚) laser irradiation. The depth of the etched groove increases with increasing a laser fluence, and decreasing a scan speed. Using the second harmonic of the Nd:YAG laser, the threshold laser fluence was 6.5 mJ/㎠ for the sample of PDP barrier rib dried at 120 ℃. The thickness of 150 ㎛ of the sample on the glass was etched without any damage on the glass substrate by fluence of 19.5 J/㎠. The barrier rib sample on hot plate was etched by Nd:YAG laser(532 ㎚) as increasing a temperature of the sample. In this case, the etch rate was 95 ㎛/s, 190 ㎛/s at room temperature, 175 ℃ respectively. Laser direct etching for a PDP cell using Nd:YAG laser