Synthesis of Silica coated Silicon Sludge Waste via Sol-Gel Method and Its Application for EMC Filler

초록

Herein, silicon sludge waste generated from semiconductor manufacturing process is recycled and applied as an Epoxy Molding Compound (EMC) filler. In detail, silicon sludge waste (SW) is treated with acid to remove metal impurities, followed by a sol-gel method to synthesize silica-coated silicon sludge waste (S-SW). As-fabricated S-SW is then mixed with epoxy resin, carbon black, and a curing agent to prepare EMC (S-SW EMC). The heat dissipation properties of EMC are investigated using an IR camera. IR analysis shows that S-SW EMC exhibits a surface temperature 5 ℃ higher than silica-based EMC. This enhanced heat dissipation is attributed to the excellent thermal conductivity (150 W/mK) of the silicon substrate and the silica layer on S-SW, which effectively improves EMC’s thermal performance. Hence, this study proposes a novel recycling method for silicon sludge waste by utilizing it as an EMC filler material through silica coating. 본 연구 성과물은 2025년도 정부(교육부)의 재원으로 한국연구재단의 지원을 받아 수행된 기초연구사업임 (RS-2024-00464661).