A Mesh Generation Algorithm for Complex Geometry

초록

An algorithm of mesh generation for curved surface is proposed to investigate an complex structure on a semiconductor substrate. This algorithm relies on the advancing front method with scattered data interpolation through NURBS (non-uniform rational B-spline) surface. This algorithm has been applied to a cell-based simulation and a level set simulation. The NURBS mesh according to our algorithm excellently represented the surface evolution of the topography.