Development of LiDAR-Recognizable True Black Material utilizing Semiconductor Industrial Waste

초록

In this study, a novel LiDAR-recognizable hollow black titania (HBT) is synthesized by recycling silicon-containing sludge waste generated from semiconductor manufacturing process as a template. In detail, HBT is prepared via combination of sol-gel, HF etching, and NaBH4 reduction. The as-synthesized HBT is mixed with hydrophilic varnish and applied to the glass substrate. As-prepared HBT-based paint exhibited true blackness (L*=11.8) with high near-infrared (NIR) reflectance of 26.9 R% at 905 nm, attributed to the difference in refractive indices between black titania (n=1.7) and air (n=1.0). Practical application of HBT-based paint examined by commercial LiDAR sensors, demonstrating successful recognition. In this regard, this study presents the potential of HBT as a practical LiDAR-recognizable black material derived from silicon-containing sludge waste. -본 연구는 2025년도 정부(교육부)의 재원으로 한국연구재단의 지원을 받아 수행된 기초연구사업임(No. 2022R1A6A1A03051705). Keyword: Semiconductor manufacturing process, Sludge waste, Black titania, NIR reflectance, LiDAR recognition.