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Surface analysis of fluorine-plasma etched Y-Si-Al-O-N oxynitride glasses

  • KIM HYUNG SUN
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Surface analysis of fluorine-plasma etched Y-Si-Al-O-N oxynitride glasses
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KIM HYUNG SUN
학회명
한국재료학회 춘계학술발표대회 및 제 16회 신소재 심포지엄

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