마이크로 소자의 표면 패턴 측정을 위한 백색광 간섭계의 신호 처리 방법

초록

In this paper, we measured the array of micro metal solder balls using white-light interferometry. first, we use a moving average method for interference fringe extract performance enhancing. and after envelope detection processing at each pixel, we filter out the point noise using modified average filter.