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Kinetic Monte Carlo(KMC) Modeling for Boron Diffusion in Strained Silicon

  • WON TAEYOUNG
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Kinetic Monte Carlo(KMC) Modeling for Boron Diffusion in Strained Silicon
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WON TAEYOUNG
학회명
Extended Abstracts of the 2006 International Conference on Solid State Devices And Materials

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