Application of Powder Blasting Techniques to Micro-Pattern Making Process for Si3N4-hBN Composites

초록

In this study, micro powder blasting techniques are applied to micro-pattern making process using developed Si3N4-hBN composites. Material properties of the developed machinable ceramics according to the variation of h-BN contents, those are used to give good machinability to the ceramics, are evaluated. And, a series of required experimental works are performed to determine optimum powder blasting conditions for micro-pattern making. The experiments are performed for the prepared samples with no mask, and samples with three different mask patterns. As the results, it can be observed that the machiniability of the developed Si3N4-hBN composites increases as the h-BN contents in the composites. Also, from the experimental results, it is possible to determine the optimum blasting conditions for micro-pattern making process with Si3N4-hBN composites.