Mechanism of unidirectionally and laterally grown ZnO nanorods arrays on inclined columnar seed layer

  • LEE SEUNG GOL

초록

In recent years, laterally grown ZnO nanrod structures have been used in various semiconductor devices. These applications typically have a metal semiconductor-metal(MSM) structure, where ZnO nanorods are laterally grown to fill gaps of interdigited metal electrodes, Hydrothermal method of growing ZnO nanorods is widely used, and for lateral growth it is neccessary to form metal blocking layers on the ZnO seed layer to prevent vertical growth.

제목
Mechanism of unidirectionally and laterally grown ZnO nanorods arrays on inclined columnar seed layer
저자
LEE SEUNG GOL
학회명
38th International Conference on Micro and Nano Engineering
개최지
Toulouse
학회 개최일
2012-09-16 ~ 2012-09-20