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초록
In recent years, laterally grown ZnO nanrod structures have been used in various semiconductor devices. These applications typically have a metal semiconductor-metal(MSM) structure, where ZnO nanorods are laterally grown to fill gaps of interdigited metal electrodes, Hydrothermal method of growing ZnO nanorods is widely used, and for lateral growth it is neccessary to form metal blocking layers on the ZnO seed layer to prevent vertical growth.
- 제목
- Mechanism of unidirectionally and laterally grown ZnO nanorods arrays on inclined columnar seed layer
- 저자
- LEE SEUNG GOL
- 학회명
- 38th International Conference on Micro and Nano Engineering
- 개최지
- Toulouse
- 학회 개최일
- 2012-09-16 ~ 2012-09-20