진공증착법에 의해 제조된 PVDF 박막의 전기전도현상과 열자격전류에 관한 연구

초록

In this study, PVDF thin films, which show the excellent piezoelectricity and pyroelectricity, are prepared by PVD(physical vapor deposition) method, and their electrical conduction phenomena for analyses of the electrical conduction mechanism and TSC(Thermally Stimulated Current) for identification of the behavior of conductive carriers are investigated. As a result of FT-IR(Fourier Transform Infrared Spectroscopy) spectra, the crystalline phase transforms α type into β type with increasing electric field. From XRD(X-Ray Diffraction analyses) patterns, the degree of crystallinity increased from 49.8 % to 67 %, as the substrate temperature increases from 30 ℃ to 80 ℃. As a result of electrical conduction phenomena, the electrical conduction mechanism of PVDF thin films is identified as ionic conduction mechanism. From TSC analyses, there are three peaks as P1, P2, P3 with increasing temperature, and with increasing substrate temperature, peak temperature of TSC increases and peak intensity of TSC decreases