Recycling Silicon Sludge from Semiconductor Dicing Process for Titanium Dioxide Coating in Paints

초록

Herein, silicon sludge waste generated during semiconductor dicing process is coated with titanium dioxide (TiO2) and applied as a pigments for paints. Specifically, metallic impurities on the surface of silicon sludge are removed via acid washing using HCl, yielding high-purity silicon sludge waste powder (SSw). Subsequently, SSw is coated with TiO₂ using the sol-gel method (SSw/TiO₂). The thickness of the TiO2 coating layer is controlled to achieve of white and yellow color. The as-synthesized white and yellow-colored SSw/TiO₂ pigments are dispersed in hydrophilic transparent paint and spray-coated onto glass substrates to evaluate their feasibility for use in paints. The CIE L*a*b* color coordinate values of the painted substrates are measured based on the CIE L*a*b* color space system. The results indicate that the corresponding values fall within the expected ranges for white and yellow, with L* values of 69.1 for white and 75.3 for yellow. This study presents an effective method for recycling silicon sludge as a pigment for paint, demonstrating its potential as a viable and sustainable pigment material. Keywords : Silicon sludge, Recycling, Titanium dioxide, Semiconductor, Paint. †Corresponding Author: cmyoon4321@inha.ac.kr