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Kinetic Monte Carlo Study on Impurity Diffusion Posterior to Silicon/Germanium Amorphization Implant

  • WON TAEYOUNG
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Kinetic Monte Carlo Study on Impurity Diffusion Posterior to Silicon/Germanium Amorphization Implant
저자
WON TAEYOUNG
학회명
2007 International Conference on Nano Science and Nano Technology

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