정전구동형 MEMS 시스템의 모델링 및 시뮬레이션 연구

초록

In this paper a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography dara with an arbitrary structure. In the methodology the mask layout and process recipe of a device are first generated and the model then descretized by an automesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification.