Basic Study in Micro V-groove Shaping with Single Crystal Diamond Tool

초록

In recent, optical and electronic parts with ultraprecision micro patterns are widely used. Among those parts, fresnel lens and light guide panel of TFT-LCD require ultraprecision micro V-groove pattern. Conventional groove fabrication methods such as chemical etching and lithography have some disadvantages in ultraprecision shape accuracy, surface roughness and available materials and so on. Therefore, mechanical micromachining methods using single crystal diamond tools and ultraprecision machine tools is expected to be very efficient, and widely studied. This paper studies the creation of ultraprecision micro V-groove using non-rotational single point diamond tool and CNC machining center. The shaping type machining method proposed in the study produces V-grooves of 40㎛ in width and 20㎛ in depth. For the analysis of machining characteristics in micro V-grooving, three components of cutting forces and AE signal are measured and processed. The effects of depth of cut, cutting speed and cross-sectional area of uncut chip on the cutting forces and AE is verified. Finally, three dimensional shape analysis of machined micro V-grooves is carried out. Experimental results showed that proposed micro V-groove machining method could be successfully applied for investigating the cutting mechanics and forming the parts with ultraprecision micro patterns.