Sol-Gel 법으로 제작된 PZT(30/70) 후막의 초전특성

초록

PZT(30/70) thick film was fabricated by using 1,3 propanediol-based sol-gel method. Prepared film of pyroelectric property was investigated by Dynamic method of modulation frequency dependence. Pyroelectric coefficient was obtained about 5.0×10-8 C/cm2·K. The figure of merits for voltage responsivity and specific detectivity were 3.4×10-11 C·cm/J and 5.9×10-9 C·cm/J, respectively, because of relative high-dielectric constant and high-pyroelectric coefficient. Voltage responsivity was increased at low modulation frequency and it was decreased at high modulation frequency. Voltage responsivity was maximum 1.84 V/W at 10 Hz. As Johnson noise is dominant, Noise voltage was increased nearly proportional to f-1/2. Noise equivalent power and specific detectivity were 2.83×10-7 W/Hz1/2 and 3.13×105 cm·Hz1/2/W the same frequency at 80 Hz, respectively.