AFM nanotube-tip의 제작과 미세 광도파로 측정에의 응용

초록

제8회 광전자 및 광통신 학술회의 (COOC 2001) 논문집, (2001. 5. 16~18). *** 무주 리조트, "" We fabricated the AFM nanotube-tip with SEM manipulator. A multi-wall carbon nanotube, which is purified by the thermal oxidation, is attached onto a conventional Si tip for a AFM using a SEM manipulator equipped with two independent stages. The nanotube is fixed on the Si tip by electron beam deposition of carbon.