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초록
Optical, chemical, and mechanical properties of fluorine-doped SiO2(SiOxFy) films prepared by ion-beam-assisted deposition are investigated to utilize them as a low-index material.
- 제목
- Characteristics of SiOxNy thin films prepared by ion beam assisted deposition
- 제목 (타언어)
- 이온빔보조증착을 이용한 SiOxFy 박막의 특성
- 저자
- CHANG KWON HWANGBO
- 학회명
- 1999 OSA Technical Digest Series, Optical Interference Coatings