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CHARACTERIZATION OF PLASMA CHARGING DAMAGE IN HfO2/TaN GATE STRUCTURE OF MISFET

  • PARK SEGEUN
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CHARACTERIZATION OF PLASMA CHARGING DAMAGE IN HfO2/TaN GATE STRUCTURE OF MISFET
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PARK SEGEUN
학회명
E-MRS IUMRS ICEM 2006 SPRING MEETING

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