Study of 100 MeV O<SUP>7+</SUP> Ion Beam Irradiation Effects on Spray Deposited 5 wt% 'Li' doped MoO3 Thin Film

초록

Molybdenum trioxide doped with 5 wt% lithium was deposited using indigenously built spray pyrolysis unit onto ITO coated glass at a substrate temperature of 325 degrees C. The XRD patterns revealed the pristine film to have orthorhombic structure while partial amorphization to take place in the film irradiated with O7+ ion beam. The Raman peak at 996cm(-1) confirms the deposited film to belong to orthorhombic phase which is due to the stretching vibration of the terminal oxygen atoms (Mo6+=O). Lower transmittance was observed for both the films and a red shift in band gap was observed for the irradiated compared to the pristine film. Transport properties were also studied for both the pristine and irradiated films and the results are discussed in detail.