저전압 압전 초음파 액츄에이터

초록

In this study, a piezoelectric ultrasonic actuator has been described by proposing a design model and simulated by using a commercial FEA program, ANSYS . The actuator was composed of a stator that consists of steel cylinders fixed on the surface of a thin piezoelectric membrane and a sliding beam which pressed in contact with two rotors. Two cylindrical permanent magnets pressed in contact with the top surface of each axis. A travelling wave of natural flexural vibration was generated from the motion of a piezoelectric membrane. And the generated travelling wave causes rotating motion of rotors which is amplified by steel axes built on the surface of piezoelectric membrane. The main advantages of this actuator are large displacement, high speed and mobility at a low voltage(±18 V). Due to high efficiency of very thin piezoelectric membrane, the actuator can be easily adapted to any microsystems.