High-k Dielectric Sol-Gel Hybrid Materials

초록

A series of novel high-k thin composite film of orgamic-inorganic hybrid materials were synthesized by non-hybroytic sol-gel reaction. To this end, organic-inorganic hybrid materials with high electronic polarizability are prepared as a matrix material,which forms a covalently-bonded interface with hafnium alkoxide precursors through a chemical crosslinking reaction. Non-hybrolytic sol-gel reaction was performed at 80℃ and followed by thermal condensation and elimination of methanol as a byproduct. By using the sol-gel reaction, a high degree of dispersion of the dielectric hafnium moieties was achieved. It significantly improves the dielectric properties of the final composite films. The excellent mechanical integrity, as evidenced by its flexibility, toughmess and adhesion, which was successfully tailored to meet the needs of specific electronic applocations.