Lateral growth of ZnO nanorod and its UV photoresponse

초록

ZnO seed layer was deposited on glass by oblique angle sputtering method and Cr thin film as a metal barrier was patterned by lift-off technique. Lateral ZnO nano-rods arrays were grown on glass substrate by the hydrothermal method. Growth angle and length of the nano-rods are strongly dependent on the oblique-angle of seed layers. SEM images show that growth of the nano-rods starts from edges of ZnO seed layers and Cr patterns. Photoluminescence measurement show a characteristic peak 385 nm of ZnO. Upon UV illumination of 365 nm light, photoelectric current increases by 50 times(from 150 nA to 7.5uA) within 7 seconds at the bias of 5 V.