A new hybrid mount actuator consisting of air spring and magneto-rheological damper for vibration control of a heavy precision stage

초록

In this study, a hybrid mount actuator featuring both the air sprung and magneto-rheological (MR) damper is devised for the vibration control of precision manufacturing or inspection stages. After briefly describing the structural configuration of the precision stage, both static and dynamic stress analyses are carried out to determine the appropriate size and weight of the hybrid actuator. The air spring is designed considering the static load of the stage and assuming adiabatic process conditions between the actuator and the surrounding space. The MR damper is designed considering the controllable range of the field dependent damping force based on the Bingham model of MR fluid. Then, four hybrid mount actuators are manufactured followed by the identification of the field-dependent damping force characteristics. Subsequently, four actuators are installed into the precision semi-conductor inspection stage to evaluate the vibration control performances. In this study, a simple but very effective proportional-integral-derivative (PID) controller is designed and empirically realized in order to drive the hybrid mount actuators. It is demonstrated that by activating the proposed hybrid actuators, the unwanted vibrations of the precision stage are substantially reduced in the operating frequency (up to 30 Hz) and fast settling time is achieved in the transient vibration. (C) 2018 Elsevier B.V. All rights reserved.

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