Unraveling the Mechanism of CVD Growth of WSe2 in Confined Space using Salt-based Precursor

초록

Two-dimensional transition metal dichalcogenides (TMDs) have garnered significant attention for their potential in electronic and optoelectronic devices. While chemical vapor deposition (CVD) is a primary technique for producing large-area monolayer TMDs, the use of metal oxide precursors with high melting points presents various synthetic challenges. As an alternative, metal salt-based precursors have emerged due to their water solubility and low melting points. However, the growth mechanism when synthesizing monolayer (ML) TMDs using these precursors remains unclear, and further investigation is needed, particularly regarding the molten salt droplets, which play a crucial role in the vapor-liquid-solid growth of TMDs.