The Plasma Polymerization of (MMA+STYRENE+TMT): Electrical Properties

초록

The thin films of MST(Methyl Methacrylate+Styrene+Tetramethytin) have been fabricated by the plasma polymerization of capacitively coupled gas flow system. It was found that this monomer produces uniform films with a wide range of thickness, from hundreds of nanometers to tens of micrometers. The depositon rate appeared to be dependent on the power and the pressure. The molecular structures of MST thin film were confirmed by IR, SEM and Auger electron spectroscopy. Its conductivity increased with increasing temperature, and the adsorption current hardly appeared. It is shown that the conduction carriers in high field region are ions. The activation energy is about 1.1eV. and The dielectric constant is about 3.5F/m