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초록
In this study, RF magnetron sputter techniques were used to prepare the Tb-doped nc-Si thin films. We investigated the nano-structural and chemical characteristics of the Tb-doped nc-Si films as a function of deposition parameters and post-deposition heat-treatment conditions.
- 제목
- Effect of Tb-doping on the Nano-structural and Optical Features of Nano-crystalline Si Thin Films
- 저자
- CHO NAMHEE
- 학회명
- Yamada Conference LVII on Atomic-scale surface designing for functional low-dimensional materials