Manufacturing and Macroscopic Properties of Y2O3 Coating layer on Ceramic Substrate (AlN) Fabricated by Aerosol Deposition

제목
Manufacturing and Macroscopic Properties of Y2O3 Coating layer on Ceramic Substrate (AlN) Fabricated by Aerosol Deposition
저자
LEE KEE AHN
학회명
ISIMP 2017